Tokyo Seimitsu / ACCRETECH / Opt-measure
High accuracy, wide temperature range, compact sensor head
Non-contact displacement sensor using new light source and interferometry

Non-contact 3D roughness/shape measuring machine Opt-scope series
Special large type "Opt-scope Rex" Notice of sales start Tokyo Seimitsu Co., Ltd. has released a special large type "Opt-scope Rex", a 3D white interference microscope that measures nano-level surface properties and have started the sales.

This machine is newly added to the lineup as a large type of non-contact 3D roughness and shape measuring machine Opt-scope. In the previous Opt-scope series, the driving range of the motorized XY stage was 200 mm square at maximum, but with the "Opt-scope Rex", it is now possible to support up to 400 to 600 mm square. In addition, Tokyo Seimitsu will responds to customer requests such as wanting to increase the XY motorized stage driving range to 600 mm or more and increasing the maximum weight of the workpiece.

"Opt-scope Rex" can measure nano-level surface properties (roughness/fine shape). It can be used for measuring semiconductors, semiconductor manufacturing equipment, molds, etc., which have many large workpieces. Tokyo Seimitsu will continues to strengthen their product lineup in order to meet the wide range of measurement needs of customers.

[Basic specifications] Opt-scope Rex st400

　Measurement method: vertical scanning low coherence interferometry
　Vertical resolution: 0.01 nm
　Z-axis indication accuracy: ±(0.1 +|H/1000|) µm (H: measurement height µm)
　Maximum workpiece height: 102 mm
　Maximum work load mass: 30 kg
　Electric XY stage size: 400 mm square