TORR

As a standard model for semiconductor and LCD gases, we offer a wide range of models from high pressure to low pressure, and from low flow rates to high flow rates. For corrosive gases, we have models equipped with highly corrosion-resistant alloys for the gas-contacting metal parts.

TORR-50 Series

Models for medium flow rates in production lines:
- Maximum Inlet Side Operating Pressure: 3.5MPa
- Maximum Outlet Side Operating Pressure:
-0.1 to 1.5MPa gauge, with pressure gauge: 1.0MPa
-0.1 to 1.0MPa gauge, with pressure gauge: 0.6MPa
-0.1 to 0.6MPa gauge, with pressure gauge: 0.4MPa
-0.1 to 0.3MPa gauge, with pressure gauge: 0.2MPa
- Usual Flow Rate (converted to nitrogen gas equivalent flow rate): 400 to 800L/min (nor)

For drawings, CAD data, and operation manuals, please refer to the link below.