High sensitivity detects and measure the leak of an object using helium gas. Easy operate and self-calibration. Minimum measurement leak of 10-13Pa・m3/s

USE
This is an inspection device that uses helium gas as a leak inspection gas to detect the leak location and leak amount of the test piece. It is used in many industrial fields.
Example: vacuum, semiconductor, automobile, medical, air conditioning, etc.

FEATURE
Suitable for inspection of objects with a small amount of leakage. (Minimum 10-13Pa ・ m3 / s) It is environmentally friendly and easy to use.