REGAL JOINT CO., LTD.
Most recent update: 2026-08-21
PR message
It is used in cooling water piping systems for cooling industrial machinery such as semiconductor manufacturing equipment.
Its key feature is a proprietary integrated piping system called a “manifold,” which compactly consolidates multiple cooling water circuits and incorporates components such as flow meters and valves for centralized control.
●Do you face challenges like these?
☑ Concerned about flow rate errors caused by liquid temperature fluctuations
☑ Selecting flow meters for each specific chemical is cumbersome
☑ Verifying material compatibility takes too much time
☑ Need to install equipment in limited space within the system
☑ Want to stabilize flow management and maintain equipment quality
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The Multi-Flow R™ with temperature compensation solves these issues!
●Features
・Measures both flow rate and temperature
・Flow measurement principle:
Detects Karman vortices generated by a pole using a piezoelectric element; a microcontroller processes the signal to display flow rate and temperature.
・Built-in temperature sensor measures fluid temperature; temperature compensation reduces accuracy errors caused by liquid temperature fluctuations
・Wetted parts consist solely of New PFA (O-ring-free design); compatible with approximately 80 types of chemicals
・Compact design
・Supports a wide flow rate range (from 0.3–2.5 L/min up to 10–100 L/min)
●Applications & Use Cases
・Semiconductor and FPD manufacturing equipment
・Chemical flow management in wet processes
・Flow monitoring for ultrapure water supply lines
・Circulation flow control for cleaning equipment
・Cooling water management for temperature control systems
・Chemical supply facilities
・Chemical circulation lines
・Flow monitoring for acidic and alkaline chemicals
・Chemical supply units
・Various industrial equipment
・Chillers and cooling water circulation systems
・Industrial cleaning equipment
・Temperature control systems
● Do you face challenges like these?
☑ Want to easily check and manage flow rates in ultrapure water lines
☑ Want to stably monitor flow rates of cooling water or circulating water within equipment
☑ Looking for flow management equipment compatible with chemical lines
☑ Looking for a compact flow meter for space-saving equipment integration
☑ Want to detect flow anomalies early to ensure stable equipment operation
↓
The FS chemical-compatible model provides the solution!
Supports "visualization" of chemical lines and stable operation
● Features
・Flow monitoring compatible with chemical fluids
・FS specifications offering excellent chemical resistance
・Compact design suitable for integration into semiconductor manufacturing equipment
・High reliability due to simple construction
・Contributes to reduced equipment costs
● Applications & Use Cases
Chemical line management for semiconductor and FPD manufacturing equipment
Flow monitoring for chemical supply systems
Flow rate verification and management for chemical supply lines
Flow monitoring for chemical circulation lines
Flow management for ultrapure water supply lines
Flow rate verification for ultrapure water in cleaning processes, etc.
Flow monitoring for cooling water lines
Cooling water management essential for stable equipment operation
Integration into R&D facilities and evaluation equipment
● Do you face challenges like these?
☑ Want to measure the flow rate of chemicals or ultrapure water stably
☑ Want to prevent wear or deterioration of moving parts in contact with the fluid
☑ Want to monitor even minute flow rates with high precision
☑ Want to minimize pressure loss and ensure stable fluid supply
☑ Looking for a highly reliable flow meter suitable for semiconductor manufacturing equipment
↓
The USL-20L Ultrasonic Karman Vortex Flow Meter provides the solution!
Achieve long-term, stable flow monitoring through a moving-part-free design and ultrasonic detection.
● Features
・High-precision detection of Karman vortices using ultrasonic waves
・Simple structure with no moving parts
・Compatible with chemical and ultrapure water lines
・Stable fluid control with low pressure loss
・Compact design ideal for equipment integration
● Applications & Use Cases
・Flow management for semiconductor and FPD manufacturing equipment
・Chemical supply systems
・Monitoring and managing chemical supply volumes
・Ultrapure water supply lines
・Monitoring ultrapure water flow in cleaning processes
・Chemical circulation systems
・Verifying stable circulation flow rates
・R&D and evaluation equipment
・Integration into experimental setups and testing equipment
● Do you face challenges like these?
☑ Looking for highly chemical-resistant fittings for chemical fluid lines
☑ Concerned about corrosion or contamination with metal fittings
☑ Want to install chemical piping easily and reliably
☑ Looking for fittings that fit into the limited space inside equipment
☑ Want to reduce piping work time and improve equipment assembly efficiency
↓
The "i-Touch" solution makes installation easy!
Simplify piping work with tool-free, one-touch connections
One-touch fittings designed for equipment, offering space-saving and installation-friendly benefits
● Features
・Key features that provide solutions
・Excellent chemical resistance thanks to PPSU material
・Reduced installation time via one-touch connection
・Reduced contamination risk due to metal-free design
・Lightweight and compact design
・Stable connection performance
● Applications & Use Cases
・Piping connections for various equipment and facilities
・Semiconductor manufacturing equipment
・FPD manufacturing equipment
・Integration into space-constrained piping areas
・Industrial automation machinery
・Piping connections for air cylinders and pneumatic equipment
・Inspection and analysis equipment
・Piping connections inside compact equipment
・Various production facilities
・Air piping installation for assembly lines
| Company name | REGAL JOINT CO., LTD. | Website URL | |
|---|---|---|---|
| Street address |
Sagamihara City Kanagawa Japan
[See map] |
Person in charge | Takako Tanokura |
| Telephone number | Log in to display | Fax number | Log in to display |
| Capital | 57,600,000 JPY | Employees | 62 |
| Annual sales | Unregister | EMIDAS Member Number | 89576 |
| Type of manufacturing | Machine tools / Measuring machinery / Electronic parts | ||
| Main 3 products |
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