● Do you face challenges like these?
☑ Want to measure the flow rate of chemicals or ultrapure water stably
☑ Want to prevent wear or deterioration of moving parts in contact with the fluid
☑ Want to monitor even minute flow rates with high precision
☑ Want to minimize pressure loss and ensure stable fluid supply
☑ Looking for a highly reliable flow meter suitable for semiconductor manufacturing equipment
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The USL-20L Ultrasonic Karman Vortex Flow Meter provides the solution!
Achieve long-term, stable flow monitoring through a moving-part-free design and ultrasonic detection.

● Features
・High-precision detection of Karman vortices using ultrasonic waves
・Simple structure with no moving parts
・Compatible with chemical and ultrapure water lines
・Stable fluid control with low pressure loss
・Compact design ideal for equipment integration

● Applications & Use Cases
・Flow management for semiconductor and FPD manufacturing equipment
・Chemical supply systems
・Monitoring and managing chemical supply volumes
・Ultrapure water supply lines
・Monitoring ultrapure water flow in cleaning processes
・Chemical circulation systems
・Verifying stable circulation flow rates
・R&D and evaluation equipment
・Integration into experimental setups and testing equipment