● Do you face challenges like these?
☑ Want to easily check and manage flow rates in ultrapure water lines
☑ Want to stably monitor flow rates of cooling water or circulating water within equipment
☑ Looking for flow management equipment compatible with chemical lines
☑ Looking for a compact flow meter for space-saving equipment integration
☑ Want to detect flow anomalies early to ensure stable equipment operation
↓
The FS chemical-compatible model provides the solution!
Supports "visualization" of chemical lines and stable operation

● Features
・Flow monitoring compatible with chemical fluids
・FS specifications offering excellent chemical resistance
・Compact design suitable for integration into semiconductor manufacturing equipment
・High reliability due to simple construction
・Contributes to reduced equipment costs

● Applications & Use Cases
Chemical line management for semiconductor and FPD manufacturing equipment
Flow monitoring for chemical supply systems
Flow rate verification and management for chemical supply lines
Flow monitoring for chemical circulation lines
Flow management for ultrapure water supply lines
Flow rate verification for ultrapure water in cleaning processes, etc.
Flow monitoring for cooling water lines
Cooling water management essential for stable equipment operation
Integration into R&D facilities and evaluation equipment