●Do you face challenges like these?
☑ Concerned about flow rate errors caused by liquid temperature fluctuations
☑ Selecting flow meters for each specific chemical is cumbersome
☑ Verifying material compatibility takes too much time
☑ Need to install equipment in limited space within the system
☑ Want to stabilize flow management and maintain equipment quality
↓
The Multi-Flow R™ with temperature compensation solves these issues!


●Features
・Measures both flow rate and temperature
・Flow measurement principle:
Detects Karman vortices generated by a pole using a piezoelectric element; a microcontroller processes the signal to display flow rate and temperature.
・Built-in temperature sensor measures fluid temperature; temperature compensation reduces accuracy errors caused by liquid temperature fluctuations
・Wetted parts consist solely of New PFA (O-ring-free design); compatible with approximately 80 types of chemicals
・Compact design
・Supports a wide flow rate range (from 0.3–2.5 L/min up to 10–100 L/min)


●Applications & Use Cases
・Semiconductor and FPD manufacturing equipment
・Chemical flow management in wet processes
・Flow monitoring for ultrapure water supply lines
・Circulation flow control for cleaning equipment
・Cooling water management for temperature control systems
・Chemical supply facilities
・Chemical circulation lines
・Flow monitoring for acidic and alkaline chemicals
・Chemical supply units
・Various industrial equipment
・Chillers and cooling water circulation systems
・Industrial cleaning equipment
・Temperature control systems